JPS6448022U - - Google Patents

Info

Publication number
JPS6448022U
JPS6448022U JP14273987U JP14273987U JPS6448022U JP S6448022 U JPS6448022 U JP S6448022U JP 14273987 U JP14273987 U JP 14273987U JP 14273987 U JP14273987 U JP 14273987U JP S6448022 U JPS6448022 U JP S6448022U
Authority
JP
Japan
Prior art keywords
insulating material
cooling fluid
heat insulating
semiconductor
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14273987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519950Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987142739U priority Critical patent/JPH0519950Y2/ja
Publication of JPS6448022U publication Critical patent/JPS6448022U/ja
Application granted granted Critical
Publication of JPH0519950Y2 publication Critical patent/JPH0519950Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Furnace Details (AREA)
JP1987142739U 1987-09-18 1987-09-18 Expired - Lifetime JPH0519950Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987142739U JPH0519950Y2 (en]) 1987-09-18 1987-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987142739U JPH0519950Y2 (en]) 1987-09-18 1987-09-18

Publications (2)

Publication Number Publication Date
JPS6448022U true JPS6448022U (en]) 1989-03-24
JPH0519950Y2 JPH0519950Y2 (en]) 1993-05-25

Family

ID=31408943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987142739U Expired - Lifetime JPH0519950Y2 (en]) 1987-09-18 1987-09-18

Country Status (1)

Country Link
JP (1) JPH0519950Y2 (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351774A (ja) * 2005-06-15 2006-12-28 Tokyo Electron Ltd 熱処理装置、ヒータ及びヒータの製造方法
WO2007097199A1 (ja) * 2006-02-20 2007-08-30 Tokyo Electron Limited 熱処理装置、ヒータ及びその製造方法
JP2011138936A (ja) * 2009-12-28 2011-07-14 Hitachi Kokusai Electric Inc 加熱装置
JP2014079990A (ja) * 2012-10-18 2014-05-08 Tokyo Electron Ltd 断熱壁体の製造方法及び断熱壁体
JP2015040323A (ja) * 2013-08-21 2015-03-02 東京エレクトロン株式会社 断熱壁体の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146227A (en) * 1980-04-16 1981-11-13 Hitachi Ltd Heat treatment furnace
JPS59143039U (ja) * 1983-03-11 1984-09-25 富士通株式会社 加熱炉
JPS61241916A (ja) * 1985-04-18 1986-10-28 Deisuko Saiyaa Japan:Kk 半導体熱処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146227A (en) * 1980-04-16 1981-11-13 Hitachi Ltd Heat treatment furnace
JPS59143039U (ja) * 1983-03-11 1984-09-25 富士通株式会社 加熱炉
JPS61241916A (ja) * 1985-04-18 1986-10-28 Deisuko Saiyaa Japan:Kk 半導体熱処理装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351774A (ja) * 2005-06-15 2006-12-28 Tokyo Electron Ltd 熱処理装置、ヒータ及びヒータの製造方法
EP1895575A4 (en) * 2005-06-15 2009-10-21 Tokyo Electron Ltd HEAT TREATMENT DEVICE
WO2007097199A1 (ja) * 2006-02-20 2007-08-30 Tokyo Electron Limited 熱処理装置、ヒータ及びその製造方法
JP2011138936A (ja) * 2009-12-28 2011-07-14 Hitachi Kokusai Electric Inc 加熱装置
JP2014079990A (ja) * 2012-10-18 2014-05-08 Tokyo Electron Ltd 断熱壁体の製造方法及び断熱壁体
JP2015040323A (ja) * 2013-08-21 2015-03-02 東京エレクトロン株式会社 断熱壁体の製造方法

Also Published As

Publication number Publication date
JPH0519950Y2 (en]) 1993-05-25

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